Deposition of Diamond-Like Films of Hydrogenized Carbon

V. L. Bukhovets and I. G. Varshavskaya

Frumkin Institute of Physical Chemistry and Electrochemistry, Russian Academy of Sciences,
31 Leninskii pr., Moscow, 119991 Russia

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Received February 20, 2009

Abstract — Diamond-like films of hydrogenized carbon on metal substrates were produced by deposition from methane activated by capacitive electric discharge (AD) within the frequency range of 5–250 Hz and with a relative pulse duration of the charge of 1.5–17. Variations in the charge parameters (frequency, relative pulse duration, current density, methane pressure, the value of gas flow), substrate temperature, and geometry of the vacuum chamber affect the deposition rate, properties, and structures of films within a wide range. Diamondlike films of hydrogenized carbon represented nanocomposite material. The size of sp² clusters was 5–6 nm, whereas the sp³/sp² ratio of carbon and the content of bound hydrogen decreased with increasing substrate temperature and current density and decreasing methane pressure.