Редколлегия Физикохимия Поверхности и Защита Материалов - Formation of Metal (Iron)-Oxide Nanostructures and Nanocomposites by Reactive Sputtering and Low-Tem

Formation of Metal (Iron)-Oxide Nanostructures and Nanocomposites by Reactive Sputtering and Low-Temperature Reoxidation

V. A. Kotenev, D. N. Tyurin, A. Yu. Tsivadze, M. A. Petrunin, L. B. Maksaeva, and T. P. Puryaeva

Frumkin Institute of Physical Chemistry and Electrochemistry, Russian Academy of Sciences,
Leninskii pr. 31, Moscow, 119991 Russia

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Abstract — Morphology and composition of nanostructured metal-oxide coating prepared by iron reactive sputtering and subsequent low-temperature oxidation in air at 50°C were studied by atomic-force microscopy (with digital processing of images), X-ray diffraction, and resistance measurements. The growth kinetics of metaloxide nanoparticles constituting the sputtered metal-oxide composite was evaluated by the direct processing of surface AMF-images. According to the results of morphological studies after the low-temperature oxidation, the surface layer has complicated structure: the metal nanoparticles surrounded by the

Fe₂O₃ oxide phase merge to extended rod-like structures (globules) sized, on the average, 100–200 nm lengthwise, 20–30 nm in diameter. This structure allows explaining the coatings' functional properties important for their applications.